Investigation of microfabrication of diamond-like film via...

Review of Scientific Instruments 2003 Vol. 74; Iss. 8

Investigation of microfabrication of diamond-like film via focused ion beam milling

Fu, Yongqi, Bryan, Ngoi Kok Ann, Xie, Dongzhu
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Volume:
74
Year:
2003
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1593812
File:
PDF, 663 KB
english, 2003
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