Atomic layer deposition of GaN at low temperatures

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2012 Vol. 30; Iss. 1

Atomic layer deposition of GaN at low temperatures

Ozgit, Cagla, Donmez, Inci, Alevli, Mustafa, Biyikli, Necmi
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3664102
File:
PDF, 900 KB
english, 2012
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