Backscattering analysis of electron-beam-induced diffusion of tin in GaAs from dopant emulsions
Meglicki, Zdzislaw, Cohen, David D., Nassibian, Armenag G.Volume:
62
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.339555
File:
PDF, 538 KB
english, 1987