Backscattering analysis of electron-beam-induced diffusion...

Backscattering analysis of electron-beam-induced diffusion of tin in GaAs from dopant emulsions

Meglicki, Zdzislaw, Cohen, David D., Nassibian, Armenag G.
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Volume:
62
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.339555
File:
PDF, 538 KB
english, 1987
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