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[IEEE 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Suzhou, Jiangsu, China (2009.07.6-2009.07.10)] 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - MEMS failure analysis case studies using the IR-OBIRCH method - Short circuit localization in a MEMS pressure sensor
Lellouchi, D., Lafontan, X., Dhennin, J., Beaudoin, F., Pressecq, F.Year:
2009
Language:
english
DOI:
10.1109/ipfa.2009.5232714
File:
PDF, 7.76 MB
english, 2009