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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - A Novel Two-Dimensional Micromachined Accelerometer Based on Thermocapillary Heat Transfer
Liao, Ke-Min, Chen, RongshunYear:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300355
File:
PDF, 507 KB
english, 2007