Nanoparticles in SiH4-Ar plasma: Modelling and comparison...

Journal of Applied Physics 2011 Vol. 110; Iss. 10

Nanoparticles in SiH4-Ar plasma: Modelling and comparison with experimental data

Gordiets, B. F., Inestrosa-Izurieta, M. J., Navarro, A., Bertran, E.
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Volume:
110
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3658249
File:
PDF, 1.27 MB
english, 2011
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