Measurement of Young’s moduli for film and substrate by the...

Measurement of Young’s moduli for film and substrate by the mechanical resonance method

Lee, Y. H., Shin, Y. D., Lee, K. H., Rhee, J. R.
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Volume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.355510
File:
PDF, 491 KB
english, 1994
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