[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - Yield prediction using critical area analysis with inline defect data
Zhou, C., Ross, R., Vickery, C., Metteer, B., Gross, S., Verret, D.Année:
2002
Langue:
english
DOI:
10.1109/asmc.2002.1001579
Fichier:
PDF, 432 KB
english, 2002