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Mass density and hydrogen content of diamondlike carbon as related to the preparation by plasma-enhanced chemical vapor deposition
Vigild, M. E., Findeisen, E., Feidenhans’l, R., Barholm-Hansen, C., Bentzon, M. D., Bindslev Hansen, J.Volume:
79
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.361833
File:
PDF, 403 KB
english, 1996