![](/img/cover-not-exists.png)
[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - A New Fabrication Method of Nano-Fluidic Filters Using Self-Assembly of Nano-Spheres and Surface Tension
Young Ho Seo,, Doo-Sun Choi,, Kyung-Hyun Whang,Year:
2006
Language:
english
DOI:
10.1109/memsys.2006.1627797
File:
PDF, 691 KB
english, 2006