Development of the Penning ionization gauge source for...

Development of the Penning ionization gauge source for higher current

Mühle, C., Leible, K. D., Spädtke, P.
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Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148632
File:
PDF, 346 KB
english, 1998
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