A MEMS-Based Evaluation of the Mechanical Properties of...

Journal of Microelectromechanical Systems 2007 / 06 Vol. 16; Iss. 3

A MEMS-Based Evaluation of the Mechanical Properties of Metallic Thin Films

Reddy, Arun, Kahn, H., Heuer, Arthur H.
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Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.892912
Date:
June, 2007
File:
PDF, 645 KB
english, 2007
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