A study of platinum electrode patterning in a reactive ion...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1998 / 5 Vol. 16; Iss. 3

A study of platinum electrode patterning in a reactive ion etcher

Chang, Li-Hsin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581175
Date:
May, 1998
File:
PDF, 630 KB
english, 1998
Conversion to is in progress
Conversion to is failed