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[IEEE 2007 European Microwave Integrated Circuit Conference - Munich, Germany (2007.10.8-2007.10.10)] 2007 European Microwave Integrated Circuit Conference - Totally free-flexible membrane for low voltage MEMS metal contact switch

Segueni, Karim, Le Garrec, Loic, Rollier, Anne-Sophie, Robin, Renaud, Touati, Salim, Kanciurzewski, Alexandre, Buchaillot, Lionel, Millet, Olivier
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Year:
2007
Language:
english
DOI:
10.1109/emicc.2007.4412722
File:
PDF, 514 KB
english, 2007
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