Relaxation of strained Si layers grown on SiGe buffers

Samavedam, S. B., Taylor, W. J., Grant, J. M., Smith, J. A., Tobin, P. J., Dip, A., Phillips, A. M., Liu, R.

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Volume:

Year:

1999

Language:

english

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

DOI:

10.1116/1.590771

File:

PDF, 458 KB

english, 1999

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