An arrayed accelerometer device of a wide range of...

Japanese Journal of Applied Physics 2014 / 02 Vol. 53; Iss. 2

An arrayed accelerometer device of a wide range of detection for integrated CMOS–MEMS technology

Konishi, Toshifumi, Yamane, Daisuke, Matsushima, Takaaki, Masu, Kazuya, Machida, Katsuyuki, Toshiyoshi, Hiroshi
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.027202
Date:
February, 2014
File:
PDF, 1.65 MB
english, 2014
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