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Increased carbon nanotube area density after catalyst generation from cobalt disilicide using a cyclic reactive ion etching approach
Xie, Rongsi, Zhang, Can, Chen, Bingan, van der Veen, Marleen, Zhong, Guofang, Robertson, JohnVolume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4870949
Date:
April, 2014
File:
PDF, 1.32 MB
english, 2014