Structural properties of hot wire a-Si:H films deposited at...

Journal of Applied Physics 2001 Vol. 90; Iss. 10

Structural properties of hot wire a-Si:H films deposited at rates in excess of 100 Å/s

Mahan, A. H., Xu, Y., Williamson, D. L., Beyer, W., Perkins, J. D., Vanecek, M., Gedvilas, L. M., Nelson, B. P.
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Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1407317
File:
PDF, 431 KB
english, 2001
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