Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2009 Vol. 27; Iss. 6
Simple technique for beam focusing in electron beam lithography on optically transparent substrates
Schuette, Michael L., Lu, WuVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3237102
File:
PDF, 782 KB
english, 2009