Simple technique for beam focusing in electron beam...

Simple technique for beam focusing in electron beam lithography on optically transparent substrates

Schuette, Michael L., Lu, Wu
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Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3237102
File:
PDF, 782 KB
english, 2009
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