Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films
Zapien, J. A., Messier, R., Collins, R. W.Volume:
78
Year:
2001
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1358367
File:
PDF, 246 KB
english, 2001