Technology and realization of metallic curved waveguide...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2001 Vol. 19; Iss. 1

Technology and realization of metallic curved waveguide mirrors in polymer film waveguides based on anisotropic plasma etching

Wolff, S., Grosse, A., Schimper, H.-J., Giehl, A. R., Kuhnke, M., Grote, R., Fouckhardt, H.
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1335839
File:
PDF, 600 KB
english, 2001
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