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High-current metal ion beam extraction from a multicusp ion source
Inouchi, Yutaka, Tanaka, Hideki, Inami, Hiroshi, Fukumaru, Fumio, Matsunaga, KouziVolume:
61
Year:
1990
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1141244
File:
PDF, 565 KB
english, 1990