Optimization of electrostatic lens systems for low-energy...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2008 Vol. 26; Iss. 6

Optimization of electrostatic lens systems for low-energy scanning microcolumn applications

Oh, Tae-Sik, Kim, Dae-Wook, Ahn, Seungjoon, Kim, Young Chul, Kim, Ho-Seob, Ahn, Seong Joon
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Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2987949
File:
PDF, 1.28 MB
english, 2008
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