[IEEE 2013 Transducers & Eurosensors XXVII: The 17th...

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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning

Ng, E. J., Chiang, C.-F., Yang, Y., Hong, V. A., Ahn, C. H., Kenny, T. W.
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Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6626732
File:
PDF, 953 KB
english, 2013
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