![](/img/cover-not-exists.png)
[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - Design and fabrication of polymer MEMS mirror based on the mechanical characteristic evaluation of polyimide materials
Sasaki, Osamu, Terao, Kyouhei, Suzuki, Takaaki, Takao, Hidekuni, Oohira, Fumikazu, Kaibara, Yoshinori, Namazu, TakahiroYear:
2011
Language:
english
DOI:
10.1109/omems.2011.6031037
File:
PDF, 377 KB
english, 2011