Analysis and determination of the stress-optic coefficients...

Analysis and determination of the stress-optic coefficients of thin single crystal silicon samples

He, S., Zheng, T., Danyluk, S.
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Volume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1774259
File:
PDF, 615 KB
english, 2004
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