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Tailoring Ion Energy Distributions Using Pulsed Plasmas
Agarwal, Ankur, Rauf, Shahid, Collins, KenVolume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2154343
Date:
November, 2011
File:
PDF, 522 KB
english, 2011