![](/img/cover-not-exists.png)
Power absorption during deposition of polycrystalline-silicon in a lamp-heated chemical-vapor-deposition reactor
Liao, J. C., Kamins, T. I.Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345032
File:
PDF, 760 KB
english, 1990