Power absorption during deposition of...

Power absorption during deposition of polycrystalline-silicon in a lamp-heated chemical-vapor-deposition reactor

Liao, J. C., Kamins, T. I.
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Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345032
File:
PDF, 760 KB
english, 1990
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