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[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Self-aligned microbonding technique for making butt-coupled germanium metal-semiconductor-metal waveguide photodetectors
Chen, Wei-Ting, Tseng, Chih-Kuo, Chen, Ku-Hung, Na, Neil, Lee, Ming-Chang M.Year:
2013
Language:
english
DOI:
10.1109/omn.2013.6659054
File:
PDF, 458 KB
english, 2013