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[IEEE 2010 8th World Congress on Intelligent Control and Automation (WCICA 2010) - Jinan, China (2010.07.7-2010.07.9)] 2010 8th World Congress on Intelligent Control and Automation - Improving wafer fabrication performance by Hierarchical colored timed Petri-net and SA - based approach

Cao, Zhengcai, Yingtao Zhao,, Qiao, Fei
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Year:
2010
Language:
english
DOI:
10.1109/wcica.2010.5553803
File:
PDF, 509 KB
english, 2010
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