A study of heating rate and texture influences on annealing hillocks by a statistical characterization of Al thin-film topography
Bacconnier, B., Lormand, G., Papapietro, M., Achard, M., Papon, A.-M.Volume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.342065
File:
PDF, 1020 KB
english, 1988