Defect site competition for metal atoms in intrinsically...

Defect site competition for metal atoms in intrinsically gettered silicon: Numerical model

Lavine, J. P.
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Volume:
62
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.339592
File:
PDF, 654 KB
english, 1987
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