High-speed electroplating of copper using the laser-jet...

Applied Physics Letters 1985 Vol. 46; Iss. 10

High-speed electroplating of copper using the laser-jet technique

von Gutfeld, R. J., Vigliotti, D. R.
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Volume:
46
Year:
1985
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.95814
File:
PDF, 456 KB
english, 1985
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