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[IEEE 2007 IEEE Sensors - Atlanta, GA, USA (2007.10.28-2007.10.31)] 2007 IEEE Sensors - Development of an infrared thermopile detector with a thin self-supporting SU-8 membrane

Mattsson, C.G., Thungstrom, G., Bertilsson, K., Nilsson, H-E., Martin, Hans
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Year:
2007
Language:
english
DOI:
10.1109/icsens.2007.4388531
File:
PDF, 307 KB
english, 2007
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