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X-ray double crystal characterization of single crystal epitaxial aluminum nitride thin films on sapphire, silicon carbide and silicon substrates
Chaudhuri, J., Thokala, R., Edgar, J. H., Sywe, B. S.Volume:
77
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359158
File:
PDF, 772 KB
english, 1995