High-fluence Si-implanted diamond: Formation of SiC nanocrystals and sheet resistance
Weishart, H., Heera, V., Eichhorn, F., Pécz, B., Barna, Á., Skorupa, W.Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1587005
File:
PDF, 881 KB
english, 2003