[IEEE 2007 7th IEEE Conference on Nanotechnology (IEEE-NANO) - Hong Kong, China (2007.08.2-2007.08.5)] 2007 7th IEEE Conference on Nanotechnology (IEEE NANO) - Study of nanopattern forming with chemical coatings for silicon-based stamp in nanoimprint process
Tien-Li Chang,, Jung-Chang Wang,Year:
2007
Language:
english
DOI:
10.1109/nano.2007.4601305
File:
PDF, 615 KB
english, 2007