X‐ray photoelectron and Auger electron spectroscopy study...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1993 / 05 Vol. 11; Iss. 3

X‐ray photoelectron and Auger electron spectroscopy study of ultraviolet/ozone oxidized, P2S5/(NH4)2S treated GaAs(100) surfaces

Chester, M. J., Jach, Terrence, Dagata, J. A.
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578759
Date:
May, 1993
File:
PDF, 826 KB
english, 1993
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