Transparent conducting amorphous Zn–Sn–O films deposited by...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 4

Transparent conducting amorphous Zn–Sn–O films deposited by simultaneous dc sputtering

Moriga, Toshihiro, Hayashi, Yukako, Kondo, Kumiko, Nishimura, Yusuke, Murai, Kei-ichiro, Nakabayashi, Ichiro, Fukumoto, Hidenori, Tominaga, Kikuo
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1765658
File:
PDF, 556 KB
english, 2004
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