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Secondary ion mass spectrometry of deep trench capacitors in dynamic random access memory
Parks, C. C., Glawischnig, H., Levy, M., Stengl, R., Dieseldorff, Chr.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581785
File:
PDF, 451 KB
english, 1999