Secondary ion mass spectroscopy characterization of the deuterium sintering process for enhanced-lifetime complementary metal–oxide–semiconductor transistors
Lee, JinjuVolume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581298
Date:
May, 1998
File:
PDF, 375 KB
english, 1998