Analysis of stresses in Ru thin films prepared by chemical...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2003 Vol. 21; Iss. 4

Analysis of stresses in Ru thin films prepared by chemical vapor deposition

Lim, Ha Jin, Kang, Sang Yeol, Hwang, Cheol Seong, Kim, Hyeong Joon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1560713
File:
PDF, 588 KB
english, 2003
Conversion to is in progress
Conversion to is failed