Synthesis and characterization of large-grain solid-phase...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 11 Vol. 32; Iss. 6

Synthesis and characterization of large-grain solid-phase crystallized polycrystalline silicon thin films

Kumar, Avishek, Law, Felix, Dalapati, Goutam K., Subramanian, Gomathy S., Widenborg, Per I., Tan, Hui R., Aberle, Armin G.
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4897298
Date:
November, 2014
File:
PDF, 4.55 MB
english, 2014
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