Adhesion force measurement system for micro-objects in a scanning electron microscope
Miyazaki, Hideki T., Tomizawa, Yasushi, Koyano, Koichi, Sato, Tomomasa, Shinya, NorioVolume:
71
Year:
2000
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1305812
File:
PDF, 777 KB
english, 2000