Flexible piezoelectric pressure sensors using oriented...

Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films

Akiyama, Morito, Morofuji, Yukari, Kamohara, Toshihiro, Nishikubo, Keiko, Tsubai, Masayoshi, Fukuda, Osamu, Ueno, Naohiro
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Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2401312
File:
PDF, 749 KB
english, 2006
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