Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films
Akiyama, Morito, Morofuji, Yukari, Kamohara, Toshihiro, Nishikubo, Keiko, Tsubai, Masayoshi, Fukuda, Osamu, Ueno, NaohiroVolume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2401312
File:
PDF, 749 KB
english, 2006