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Influence of SiO2 at the Ta2O5/Si interface on dielectric characteristics of Ta2O5 capacitors
Nishioka, Yasushiro, Shinriki, Hiroshi, Mukai, KiichiroVolume:
61
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.337945
File:
PDF, 711 KB
english, 1987