Structural properties of as deposited and annealed ZrO2...

Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping

Weinreich, Wenke, Wilde, Lutz, Müller, Johannes, Sundqvist, Jonas, Erben, Elke, Heitmann, Johannes, Lemberger, Martin, Bauer, Anton J.
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4765047
File:
PDF, 2.15 MB
english, 2013
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