Cryogenic shallow reactive ion etch process for profile...

Cryogenic shallow reactive ion etch process for profile control on silicon on insulator platform

Bakhtazad, Aref, Huo, Xuan, Sabarinathan, Jayshri
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3597837
File:
PDF, 2.01 MB
english, 2011
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