Comparison of low energy BF[sub 2][sup +], BCl[sub 2][sup +], and BBr[sub 2][sup +] implants for the fabrication of ultrashallow P[sup +]-N junctions
Ganguly, Swaroop, Lin, Li, Kohli, Puneet, Li, Hong-Jyh, Kirichenko, Taras, Srinivasa, Raghu, Agarwal, Vikas, Banerjee, SanjayVolume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1433926
File:
PDF, 343 KB
english, 2002