Comparison of low energy BF[sub 2][sup +], BCl[sub 2][sup...

Comparison of low energy BF[sub 2][sup +], BCl[sub 2][sup +], and BBr[sub 2][sup +] implants for the fabrication of ultrashallow P[sup +]-N junctions

Ganguly, Swaroop, Lin, Li, Kohli, Puneet, Li, Hong-Jyh, Kirichenko, Taras, Srinivasa, Raghu, Agarwal, Vikas, Banerjee, Sanjay
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1433926
File:
PDF, 343 KB
english, 2002
Conversion to is in progress
Conversion to is failed