Exact 3D simulation of Scanning Electron Microscopy images...

Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields

Ciappa, Mauro, Illarionov, Alexey Yu., Ilgünsatiroglu, Emre
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Volume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.07.033
Date:
September, 2014
File:
PDF, 2.42 MB
english, 2014
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