Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields
Ciappa, Mauro, Illarionov, Alexey Yu., Ilgünsatiroglu, EmreVolume:
54
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2014.07.033
Date:
September, 2014
File:
PDF, 2.42 MB
english, 2014